Development of High Stress SiN Films for Use with Strained Silicons Technologies

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Veröffentlicht in:Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (68 : 2005 : Kyōto) Handōtai, Shuseki-Kairo-Gijutsu-68.-Shinpojiumu-kōen-ronbunshū
1. Verfasser: Varadarajan, B. (VerfasserIn)
Weitere Verfasser: Sims, J. (VerfasserIn), Christensen, M. (VerfasserIn), Ilcisin, K. (VerfasserIn), Shrinivasan, K. (VerfasserIn), Ayoub, M. (VerfasserIn), Dharmadhikari, V. (VerfasserIn), Xi, M. (VerfasserIn)
Pages:68
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2005
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