(Invited) Formation and Characterization of Fe-Silicide Nanodots for Optoelectronic Application

(Invited) Formation and Characterization of Fe-Silicide Nanodots for Optoelectronic Application

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Veröffentlicht in:Symposium "Semiconductor Process Integration" (13. : 2023 : Göteborg) Semiconductor Process Integration 13
1. Verfasser: Miyazaki, S. (VerfasserIn)
Weitere Verfasser: Makihara, K. (VerfasserIn)
Pages:13
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Sprache:eng
Veröffentlicht: 2023
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