Highly Oriented Growth of Al;Sci.x N Ferroelectric Film on W Bottom Electrodes

Highly Oriented Growth of Al;Sci.x N Ferroelectric Film on W Bottom Electrodes

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Veröffentlicht in:Pacific Rim Meeting on Electrochemical and Solid State Science (2020 : Online) Semiconductors, Dielectrics, and Metals for Nanoelectronics and Plasma Nanosciences
1. Verfasser: Tsai, S. (VerfasserIn)
Weitere Verfasser: Hoshii, T. (VerfasserIn), Wakabayashi, H. (VerfasserIn), Tsutsui, K. (VerfasserIn), Kakushima, K. (VerfasserIn)
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Sprache:eng
Veröffentlicht: 2020
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