Production Etching of Dielectrics and Metals for High Density Ferroelectric FeRAM and DRAM Applications

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Veröffentlicht in:Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (52 : 1997 : Osaka) 52. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū
1. Verfasser: Hambalek, S. (VerfasserIn)
Weitere Verfasser: Jerde, L. (VerfasserIn), Olson, K. (VerfasserIn), DeOrnellas, S. (VerfasserIn), Rajora, P. (VerfasserIn), Cofer, A. (VerfasserIn)
Pages:52
Format: UnknownFormat
Sprache:jpn
Veröffentlicht: 1997
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