High-Reliability CMOS Technology for 65-nm Node and Beyond

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Veröffentlicht in:Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (67 : 2004 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-67.-Shinpojiumu-kōen-ronbunshū
1. Verfasser: Yamashita, T. (VerfasserIn)
Pages:67
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2004
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Titel Jahr Verfasser
Carbon Nanotube Vias for Future LSI Interconnects 2004 Nihei, M.
Pore Structure-control for PECVD-derived SiOCH Film for Advanced Asics 2004 Hayashi, Y.
Re-Examination of Impact of Intrinsic Dopant Fluctuations on SRAM Static Noise Margin 2004 Tachibana, F.
HfSiON Transistor Technologies for 65nm-node Low-Standby-Power Devices 2004 Tamura, Y.
Application of Electro-Chemical Polishing in DI Water to Cu Damascene Wiring Planarization Process 2004 Noji, I.
LSI Interconnect Formation using Bottom-up Electroless Cu Plating 2004 Shingubara, S.
Characterizations of Asing Damage in Porous Low-k Dielectric Films 2004 Seki, H.
Chip-level Interconnect Scaling and Copper / Low-k Process Integration Technology for 65nm Node and beyond 2004 Shibata, H.
Spin-on Dielectric Stack Low-k Integration with EB-Curing Technology for 45nm-node and beyond 2004 Nagai, O.
A Novel Shallow Tvench Isolation Process from the View Point of Total Strain Process Design for 45nm Node Devices and Beyond 2004 Ishibashi, M.
45nm CMOS Platform Technoligy (CMOS 6) 2004 Iwai, M.
300mm CMP Technology for Porous Low-k/Cu Process 2004 Namiki, A.
A New Barrier Metal Structure with ALD-TaN for Highly Reliable Cu Dual Damascene Interconnects 2004 Mori, K.
High-Reliability CMOS Technology for 65-nm Node and Beyond 2004 Yamashita, T.
Control of Nitrogen Depth Profile in Radical Nitrided Silicon Oxide Film 2004 Kawase, K.
Characterization of Damage to Porous Low-k Material Caused by Remote Plasma Ashing 2004 Inoue, O.
Power-aware 65 nm Node CMOS Technology Using Variable VDD and Back-bias Control with Reliability Consideration for Back-bias Mode 2004 Togo, M.
Fully Compatible Integration of Embedded DRAM with 65nm CMOS Technology 2004 Yasumoto, K.
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