Characterization of Damage to Porous Low-k Material Caused by Remote Plasma Ashing

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Veröffentlicht in:Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (67 : 2004 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-67.-Shinpojiumu-kōen-ronbunshū
1. Verfasser: Inoue, O. (VerfasserIn)
Weitere Verfasser: Jimbo, T. (VerfasserIn), Katsuyama, K. (VerfasserIn), Tamaru, T. (VerfasserIn)
Pages:67
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2004
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