Effect of HCL on Surface Free Energy of SiC during CVD Trench Filling

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Veröffentlicht in:European Conference on Silicon Carbide and Related Materials (12. : 2018 : Birmingham) Silicon carbide and related materials 2018
1. Verfasser: Mochizuki, K. (VerfasserIn)
Weitere Verfasser: Ji, S. Y. (VerfasserIn), Kosugi, R. (VerfasserIn), Yonezawa, Y. (VerfasserIn), Okumura, H. (VerfasserIn)
Pages:2018
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2019
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