Aluminum Etch Characteristices Using Chlorine and Bromine Based Chemistries with Transformer Coupled Plasma System

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Veröffentlicht in:Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (43. : 1992 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 43kai Shinpojiumu
1. Verfasser: Kaiser, A. (VerfasserIn)
Weitere Verfasser: Chen, Ching-Hwa (VerfasserIn)
Pages:43
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Sprache:eng
Veröffentlicht: 1992
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Aluminum Etch Characteristices Using Chlorine and Bromine Based Chemistries with Transformer Coupled Plasma System 1992 Kaiser, A.
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