Acid Diffusion in a Chemically Amplified Resist

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Veröffentlicht in:Handōtai, Shūseki Kairo Gijutsu Shinpojiumu (45. : 1993 : Tokio) Handōtai, Shūseki Kairo Gijutsu Dai 45kai Shinpojiumu
1. Verfasser: Nakamura, J. (VerfasserIn)
Weitere Verfasser: Ban, H. (VerfasserIn), Tanaka, A. (VerfasserIn)
Pages:45
Format: UnknownFormat
Sprache:jpn
Veröffentlicht: 1993
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Gate Oxide Film Formation at a Temperature of 450° C 1993 Kawai, Y.
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