Effect of Crystal Defects Induced in Heat-treated Czochralski Silicon Wafers on Dielectric Breakdown of Thermal SiO2 Films

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Veröffentlicht in:Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (46 : 1994 : Tokio) 46. Handōtai Shuseki Kairo Gijutsu Shinpojiumu Kōen Ronbunshū
1. Verfasser: Satoh, Y. (VerfasserIn)
Weitere Verfasser: Murakami, Y. (VerfasserIn), Shiota, T. (VerfasserIn), Furuya, H. (VerfasserIn), Shingyouji, T. (VerfasserIn)
Pages:46
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 1994
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