Comparison of the Behavior of Three Different lon/Plasma Sources for Optical Coating Processes Using a Direct Current Power Supply

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Veröffentlicht in:Society of Vacuum Coaters (64. : 2021 : Online) 64th Annual Technical Conference proceedings
1. Verfasser: Willey, Ronald R. (VerfasserIn)
Weitere Verfasser: Fortenberry, Kyle (VerfasserIn), Green, Courtney (VerfasserIn)
Pages:64
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2021
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