Novel Radial Magnetron For Deposition/Etch On Inner Diameter Surfaces with High Conformality To Replace Cu, Cr, Nb Electrochemical Techniques with iPVD

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Veröffentlicht in:Society of Vacuum Coaters (65. : 2022 : Long Beach, Calif.) 65th Annual Technical Conference proceedings
1. Verfasser: Haehnlein, lan F. (VerfasserIn)
Weitere Verfasser: Huber, Wolfgang M. (VerfasserIn), Morrice, Andrew S. (VerfasserIn), Shchelkanov, Ivan A. (VerfasserIn), Stubbers, Robert A. (VerfasserIn), Jurczyk, Brian E. (VerfasserIn), Papa, Frank (VerfasserIn), Houlahan, Thomas J. Jr. (VerfasserIn)
Pages:65
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2022
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