Plasma-Enhanced Chemical Vapor Deposition of Graphene Layers by a Roll-to-Roll Process

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Veröffentlicht in:	Society of Vacuum Coaters (65. : 2022 : Long Beach, Calif.) 65th Annual Technical Conference proceedings
1. Verfasser:	Saager, Stefan (VerfasserIn)
Weitere Verfasser:	Klose, Lars (VerfasserIn), Scheffel, Bert (VerfasserIn), Fahland, Matthias (VerfasserIn)
Pages:	65
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	2022
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