DETC2021-71131 Mode-Dependent Selective Detection of Humidity and Helium Using Electromagnetically Actuated Clamped Guided MEMS Resonators

DETC2021-71131 Mode-Dependent Selective Detection of Humidity and Helium Using Electromagnetically Actuated Clamped Guided MEMS Resonators

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Veröffentlicht in:International Conference on Micro- and Nanosystems (15. : 2021 : Online) Proceedings of the ASME 2021 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC-CIE2021) ; volume 11: 15th International Conference on Micro- and Nanosystems (MNS)
1. Verfasser: Yaqoob, Usman (VerfasserIn)
Weitere Verfasser: Jaber, Nizar (VerfasserIn), Alcheikh, Nouha (VerfasserIn), Younis, Mohammad I. (VerfasserIn)
Pages:2021
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2021
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