Low Temperature BST-CVD Process for the Cup-Type Capacitors Designed for Logic-Base-Embedded DRAMs

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Veröffentlicht in:Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (62 : 2002 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-62.-Shinpojiumu-kōen-ronbunshū
1. Verfasser: Tsuzumitani, A. (VerfasserIn)
Weitere Verfasser: Okuno, Y. (VerfasserIn), Ogawa, H. (VerfasserIn), Mori, Y. (VerfasserIn)
Pages:62
Format: UnknownFormat
Sprache:jpn
Veröffentlicht: 2002
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