Critical Issues of HfSiON Hight-k Gate Insulator for CMOS Application

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Bibliographische Detailangaben
Veröffentlicht in:	Handōtai, Shuseki-Kairo-Gijutsu-70.-Shinpojiumu-kōen-ronbunshū
1. Verfasser:	Koyama, M. (VerfasserIn)
Weitere Verfasser:	Koike, M. (VerfasserIn), Ino, T. (VerfasserIn), Kamimuta, Y. (VerfasserIn), Tijima, R. (VerfasserIn), Nishiyama, A. (VerfasserIn)
Pages:	70
Format:	UnknownFormat
Sprache:	jpn
Veröffentlicht:	2006
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