Reduction of Gas Species Dependency of Thermal Conductivity Vacuum Gauges by In-System Software Calibration

Reduction of Gas Species Dependency of Thermal Conductivity Vacuum Gauges by In-System Software Calibration

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Veröffentlicht in:International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components (8. : 2014 : Wien) Smart Systems Integration 2014
1. Verfasser: Dams, Florian (VerfasserIn)
Weitere Verfasser: Schreiner, Rupert (VerfasserIn)
Pages:2014
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2019
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