Laser based vacuum hermetic sealing

Laser based vacuum hermetic sealing

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Bibliographische Detailangaben
Veröffentlicht in:International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components (8. : 2014 : Wien) Smart Systems Integration 2014
1. Verfasser: James, Rony Jose (VerfasserIn)
Weitere Verfasser: Innerhofer, E. (VerfasserIn), Stadelmann, T. (VerfasserIn), Berchtold, S. (VerfasserIn), Bosshard, M. Lützelschwab. Ch. (VerfasserIn), Epitaux, M. (VerfasserIn), Hold, A. (VerfasserIn), Vélez, C. (VerfasserIn)
Pages:2014
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2019
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