Observation of Dislocation Conversion in 4H-SIC Epitaxial Wafer by Mirror Projection Electron Microscopy

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Veröffentlicht in:European Conference on Silicon Carbide and Related Materials (12. : 2018 : Birmingham) Silicon carbide and related materials 2018
1. Verfasser: Miyaki, T. Isshiki, T. Sato, M. Hasegawa, K. Ohira, K. Kobayashi, A. (VerfasserIn)
Weitere Verfasser: Onuki, K. (VerfasserIn)
Pages:2018
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Sprache:eng
Veröffentlicht: 2019
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