Piezoresistive effect of p-type single crystalline 3C-SiC : silicon carbide mechanical sensors for harsh environments

Piezoresistive effect of p-type single crystalline 3C-SiC silicon carbide mechanical sensors for harsh environments

Dissertation, Griffith University, Queensland, Australia, 2016

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Bibliographische Detailangaben
1. Verfasser: Phan, Hoang-Phuong (VerfasserIn)
Format: UnknownFormat
Sprache:eng
Veröffentlicht: Cham, Switzerland Springer 2017
Schriftenreihe:Springer theses, recognizing outstanding Ph.D. research
Schlagworte:
Silicon carbide > Semiconductors > Microelectromechanical systems > Hochschulschrift > Siliciumcarbid > Einkristall > Nanokristall > Nanodraht > MEMS > Piezowiderstandseffekt > Sensor > Hochtemperatur
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Beschreibung
Zusammenfassung:Dissertation, Griffith University, Queensland, Australia, 2016
Introduction and literature review -- Theory of the piezoresistive effect in p-type 3C-SiC -- 3C-SiC film growth and sample preparation -- Characterization of the piezoresistive effect in p-type single crystalline 3C-SiC -- The piezoresistive effect in p-type nanocrystalline SiC -- The piezoresistive effect of top down p-type 3C-SiC nanowires -- Conclusion and perspectives
Beschreibung:Originally presented as the author's thesis (doctoral--Griffith University, Queensland, Australia)
Includes bibliographical references
Beschreibung:xxi, 146 pages
illustrations (some color)
25 cm
ISBN:9783319555430
978-3-319-55543-0
331955543X
3-319-55543-X