Materials processing by cluster ion beams history, technology, and applications

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this b...

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Bibliographische Detailangaben

1. Verfasser:	Yamada, Isao (VerfasserIn)
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	Boca Raton, London, New York CRC Press, an imprint of the Taylor & Francis Group 2016
Schlagworte:	Ion bombardment > Ion implantation > Materials > Effect of radiation on
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