Materials processing by cluster ion beams history, technology, and applications

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this b...

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Bibliographische Detailangaben
1. Verfasser: Yamada, Isao (VerfasserIn)
Format: UnknownFormat
Sprache:eng
Veröffentlicht: Boca Raton, London, New York CRC Press, an imprint of the Taylor & Francis Group 2016
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Beschreibung
Zusammenfassung:Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book:Offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBsExplores the development of sources for producing cluster beams from solid materialsDescribes the engineering characteristics of gas cluster ion beam equipmentCovers cluster ion-solid surf
Beschreibung:Literaturangaben
Beschreibung:xv, 244 Seiten
Illustrationen, Diagramme
ISBN:9781498711753
978-1-4987-1175-3