Materials processing by cluster ion beams history, technology, and applications
Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this b...
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Format: | UnknownFormat |
Sprache: | eng |
Veröffentlicht: |
Boca Raton, London, New York
CRC Press, an imprint of the Taylor & Francis Group
2016
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Zusammenfassung: | Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book:Offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBsExplores the development of sources for producing cluster beams from solid materialsDescribes the engineering characteristics of gas cluster ion beam equipmentCovers cluster ion-solid surf |
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Beschreibung: | Literaturangaben |
Beschreibung: | xv, 244 Seiten Illustrationen, Diagramme |
ISBN: | 9781498711753 978-1-4987-1175-3 |