Silicon nitride, silicon dioxide, and emerging dielectrics 10 : [papers of the International Symposium on Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics ... held May 24 - 29, 2009 in San Francisco, as a part of the 215th meeting of the Electrochemical Society (ECS)]

Silicon nitride, silicon dioxide, and emerging dielectrics 10 [papers of the International Symposium on Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics ... held May 24 - 29, 2009 in San Francisco, as a part of the 215th meeting of the Electrochemical Society (ECS)]

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Bibliographische Detailangaben
Körperschaft: Electrochemical Society Dielectric Science and Technology Division (BerichterstatterIn)
Weitere Verfasser: Sah, Ram Ekwal (BerichterstatterIn)
Format: UnknownFormat
Sprache:eng
Veröffentlicht: Pennington, NJ Electrochemical Soc. 2009
Schriftenreihe:ECS transactions 19,2
Schlagworte:
Thin film devices > Silicon nitride > Silicon dioxide > Silica > Dielectric films > Electric insulators and insulation > Thin films > Konferenzschrift
Online Zugang:Inhaltsverzeichnis
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Beschreibung
Beschreibung:X, 857 S.
ISBN:9781566777100
978-1-56677-710-0