Measuring large areas by white light interferometry at the nanopositioning and nanomeasuring machine (NPMM)

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Veröffentlicht in:Computer science meets automation ; Vol. 2
Weitere Verfasser: Kapusi, Daniel (BerichterstatterIn), Machleidt, Torsten (BerichterstatterIn), Franke, Karl-Heinz (BerichterstatterIn), Manske, Eberhard (BerichterstatterIn), Jahn, Rainer (BerichterstatterIn)
Pages:2
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Sprache:eng
Veröffentlicht: 2007
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