MEMS materials and processes handbook
The MEMS design process -- Additive processes for semiconductors and dielectric materials -- Additive processes for metals -- Additive processes for polymeric materials -- Additive processes for piezoelectric materials : piezoelectric MEMS -- Materials and processes in shape memory alloy -- Dry etch...
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| Format: | UnknownFormat |
| Sprache: | eng |
| Veröffentlicht: |
New York, NY, Heidelberg
Springer
2011
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| Schriftenreihe: | MEMS reference shelf
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| Schlagworte: | |
| Online Zugang: | Inhaltsverzeichnis Einführung/Vorwort |
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Tag hinzufügen | Zusammenfassung: | The MEMS design process -- Additive processes for semiconductors and dielectric materials -- Additive processes for metals -- Additive processes for polymeric materials -- Additive processes for piezoelectric materials : piezoelectric MEMS -- Materials and processes in shape memory alloy -- Dry etching for micromachining applications -- MEMS wet-etch processes and procedures -- MEMS lithography and micromachining techniques -- Doping processes for MEMS -- Wafer bonding -- MEMS packaging materials -- Surface treatment and planarization -- MEMS process integration. |
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| Beschreibung: | Literaturangaben |
| Beschreibung: | XXXV, 1187 S. Ill., graph. Darst. |
| ISBN: | 0387473165 0-387-47316-5 9780387473161 978-0-387-47316-1 |