2005 6th AVS International Conference on Microelectronics and Interfaces : March 21 - 23, 2005, Santa Clara, California, USA ; [proceedings ; in conjunction with the Northern California Chapter short courses and the 26th annual equipment exhibition]

2005 6th AVS International Conference on Microelectronics and Interfaces March 21 - 23, 2005, Santa Clara, California, USA ; [proceedings ; in conjunction with the Northern California Chapter short courses and the 26th annual equipment exhibition]

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Bibliographische Detailangaben
Körperschaften: American Vacuum Society (BerichterstatterIn), American Vacuum Society Northern California Chapter (BerichterstatterIn)
Format: UnknownFormat
Sprache:eng
Veröffentlicht: New York, NY AVS 2005
Schlagworte:
Konferenzschrift
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Beschreibung
Beschreibung:232 S
ISBN:0971361436
0-9713614-3-6