2003 4th AVS International Conference on Microelectronics and Interfaces : March 3 - 6, 2003, Santa Clara, California, USA ; [in conjunction with the Northern California Chapter short courses and the 24th annual equipment exhibition ; proceedings]

2003 4th AVS International Conference on Microelectronics and Interfaces March 3 - 6, 2003, Santa Clara, California, USA ; [in conjunction with the Northern California Chapter short courses and the 24th annual equipment exhibition ; proceedings]

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Bibliographische Detailangaben
Körperschaften: International Conference on Microelectronics and Interfaces (VerfasserIn), American Vacuum Society (BerichterstatterIn), American Vacuum Society Northern California Chapter (BerichterstatterIn)
Format: UnknownFormat
Sprache:eng
Veröffentlicht: New York, NY American Vacuum Society 2003
Schlagworte:
Konferenzschrift
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Beschreibung
Beschreibung:234 S
ISBN:097136141X
0-9713614-1-X