Micro-electro-mechanical systems (MEMS) - 2001 : microelectromechanical systems, microfluidics, MEMS packaging, medical applications of microsystems, fabrication and testing of micro-electro-mechanical systems,manufacturing of MEMS and related micro/nano systems, micro and mesoscale energy systems and conversion devices ; presented at the 2000 [i.e. 2001] ASME International Mechanical Engineering Congress and Exposition, November 11 - 16, 2001, New York, New York

Micro-electro-mechanical systems (MEMS) - 2001 microelectromechanical systems, microfluidics, MEMS packaging, medical applications of microsystems, fabrication and testing of micro-electro-mechanical systems,manufacturing of MEMS and related micro/nano systems, micro and mesoscale energy systems and conversion devices ; presented at the 2000 [i.e. 2001] ASME International Mechanical Engineering Congress and Exposition, November 11 - 16, 2001, New York, New York

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Bibliographische Detailangaben
Körperschaften: American Society of Mechanical Engineers MEMS Subdivision (BerichterstatterIn), International Mechanical Engineering Congress and Exposition (BerichterstatterIn)
Weitere Verfasser: Lee, Abraham P. (BerichterstatterIn)
Format: UnknownFormat
Sprache:eng
Veröffentlicht: New York, NY American Society of Mechanical Engineers 2001
Schriftenreihe:MEMS 3
Schlagworte:
Konferenzschrift > Mikrosystemtechnik > MEMS
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Beschreibung
Beschreibung:XII, 892 S
ISBN:0791835553
0-7918-3555-3