ATOMIC LAYER ETCHING AND CLEANING OF AL2O3 FROM GOLD SUBSTRATES MEASURED USING IN SITU AUGER ELECTRON SPECTROSCOPY

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Veröffentlicht in:	Surface Preparation and Cleaning Conference (2022 : Chandler, Ariz.) 2022 Surface Preparation and Cleaning Conference
1. Verfasser:	Cavanagh, A. (VerfasserIn)
Weitere Verfasser:	George, S. (VerfasserIn)
Pages:	2022
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	2023
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