OPTIMIZATION OF DUMMY POLY-SILICON REMOVAL IN HIGH-K METAL GATE PROCESS

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Veröffentlicht in:	Surface Preparation and Cleaning Conference (2022 : Chandler, Ariz.) 2022 Surface Preparation and Cleaning Conference
1. Verfasser:	Wei, X. (VerfasserIn)
Weitere Verfasser:	Wang, W. (VerfasserIn), Zhang, X. (VerfasserIn), Wang, J. (VerfasserIn)
Pages:	2022
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	2023
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