IMECE2021-73849 Investigation of the Effect and Contribution of Process Parameters By Taguchi and ANOVA Analysis on the Morphological and Electrical Properties of RF Magnetron Sputtered SiO2 Over Si Substrate

IMECE2021-73849 Investigation of the Effect and Contribution of Process Parameters By Taguchi and ANOVA Analysis on the Morphological and Electrical Properties of RF Magnetron Sputtered SiO2 Over Si Substrate

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Veröffentlicht in:ASME International Mechanical Engineering Congress and Exposition (2021 : Online) Proceedings of ASME 2021 International Mechanical Engineering Congress and Exposition (IMECE 2021) ; Volume 3: Advanced materials: design, processing, characterization, and applications
1. Verfasser: Uchayash, Sajid Mahfuz (VerfasserIn)
Weitere Verfasser: Biswas, Prosanto (VerfasserIn), Zulkarnain, Meah Imtiaz (VerfasserIn), Touhami, Ahmed (VerfasserIn), Islam, Nazmul (VerfasserIn), Huq, Hasina (VerfasserIn)
Pages:2021
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2021
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