Magnetron-Based Plasma Substrate Pre-Treatment and Etching

Magnetron-Based Plasma Substrate Pre-Treatment and Etching

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Veröffentlicht in:Society of Vacuum Coaters (65. : 2022 : Long Beach, Calif.) 65th Annual Technical Conference proceedings
1. Verfasser: Sgrilli, Tommaso (VerfasserIn)
Weitere Verfasser: McCarthy, Patrick (VerfasserIn), Bellido-Gonzalez, Victor (VerfasserIn), Monaghan, Dermot (VerfasserIn), Santiago, José Antonio (VerfasserIn), Wennberg, Ambiörn (VerfasserIn), Fernández, Iván (VerfasserIn)
Pages:65
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2022
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