Advanced Process Control by Combining Real-Time Measurements of Process and Product Properties

Advanced Process Control by Combining Real-Time Measurements of Process and Product Properties

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Veröffentlicht in:Society of Vacuum Coaters (65. : 2022 : Long Beach, Calif.) 65th Annual Technical Conference proceedings
1. Verfasser: Urbach, Jan-Peter (VerfasserIn)
Weitere Verfasser: Schütte, Thomas (VerfasserIn), Neiß, Peter (VerfasserIn)
Pages:65
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2022
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