High Power Impulse Magnetron Sputtering for Depositing Silicon-Based Films in Large Area Coaters

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Veröffentlicht in:Society of Vacuum Coaters (65. : 2022 : Long Beach, Calif.) 65th Annual Technical Conference proceedings
1. Verfasser: Oniszczuk, A. W. (VerfasserIn)
Weitere Verfasser: Gajewski, W. (VerfasserIn), Różański, P. (VerfasserIn), Heintze, M. (VerfasserIn), Bosscher, W. De (VerfasserIn)
Pages:65
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2022
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