Numerical Simulations of APCVD Films with Reaction Mechanism Analyzed by Aerosol Method

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Veröffentlicht in:Ēarozoru-Kagaku-Gijutsu-Kenkyū-Tōronkai (17 : 2000 : Higashihiroshima) 17.-Earozoru-kagaku-gijutsu-kenkyū-tōronkai
1. Verfasser: Adachi, M. (VerfasserIn)
Weitere Verfasser: Ito, Y. (VerfasserIn), Okuyama, K. (VerfasserIn), Fujimoto, T. (VerfasserIn)
Pages:17
Format: UnknownFormat
Sprache:jpn
Veröffentlicht: 2000
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