Ultra-Thin Gate Dielectric Film Formation Technology by using Microwave-Exceitation High-Density Plasma

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Chō-LSI-Urutora-Kurīn-Tekunorojī-Shinpojiumu (33 : 1999 : Tokio) Cho-LSI-Urutora-Kurin-Tekunoroji-Shinpojiumu
1. Verfasser: SEKINE, Katsuyuki (VerfasserIn)
Weitere Verfasser: KAIHARA, Ryu (VerfasserIn), SAITO, Yuji (VerfasserIn), HIRAYAMA, Masaki (VerfasserIn), OHMI, Tadahiro (VerfasserIn)
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 1999
Schlagworte:
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Titel Jahr Verfasser
Low-Temperature Si Epitaxy using Low-Energy lon Bombardment 1999 KUMAMI, Hajime
Optical Lithography beyond 0.15 um 1999 KOHNO, Michio
The Control of Etching Rate for Various SiO2 Films 1999 KEZUKA, TaKkehiko
The Development of the Microwave-Excited High-Density Plasma Enhanced CVD Equipment 1999 MORII, Akio
Precise Control of Gas Concentration Ratio in Process Chamber 1999 NAKAMURA, Osamu
SIMOX Wafer Technology 1999 MATSUMURA, Atsuki
ELTRAN® Epitaxial Layer Transfer 1999 YONEHARA, Takao
Low-Power Logic LSIs using SOI-CMOS Technology 1999 MAEGAWA, Shigeto
New Cleaning Method for Large Size Glass Substrate and Reducing Chemicals and UPW Consumption 1999 MITSUMORI, KEN-Iichi
Particle Counting Method for Ultrapure Water using Centrifugal Filtration Machine and Scanning Electron Microscope 1999 MIZUNIWA, Tetsuo
High Efficiency and Highly Productive Semiconductor Manufacturing with Low Capital Inverstiment 1999 OHMI, Tadahiro
Reactive lon Etching 1999 KOMEDA, Hiroyuki
Ultra-Thin Gate Dielectric Film Formation Technology by using Microwave-Exceitation High-Density Plasma 1999 SEKINE, Katsuyuki
The Way to 0.15 um Lithography and After 1999 KAMEYAMA, Masaomi
Development of Smart Cut® SOI Technology 1999 MITANI, KiyoShi
Recent Advancement of SOI Technology from Low-Power Logic LSI to Low Cost Lateral BJT's 1999 YOSHIMI, Makoto
Gradational Lead Screw Vacuum Pump Development 1999 ANDO, Kiyoshi
Development of Magnetically Levitated Molecular Drag Pump 1999 NONAKA, Manabu
Advanced Single Si Wafer Cleaning System 1999 NITTA, Takahisa
Alle Artikel auflisten