(Invited) Border-Trap Characterization for Ge Gate Stacks with Thin GeOx layer Using Deep-Level Transient Spectroscopy

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Veröffentlicht in:Pacific Rim Meeting on Electrochemical and Solid State Science (2020 : Online) (9.) SiGe, Ge, and Related Compounds: Materials, Processing, and Devices 9
1. Verfasser: Nakashima, H. (VerfasserIn)
Weitere Verfasser: Wen, W. C. (VerfasserIn), Yamamoto, K. (VerfasserIn), Wang, D. (VerfasserIn)
Pages:9
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2020
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