(Invited) Epitaxial Growth of Ge/III-V Films and Hetero-Layer Lift-off for Ultra- Thin GeOI Fabrication

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Veröffentlicht in:	Pacific Rim Meeting on Electrochemical and Solid State Science (2020 : Online) (9.) SiGe, Ge, and Related Compounds: Materials, Processing, and Devices 9
1. Verfasser:	Maeda, T. (VerfasserIn)
Weitere Verfasser:	Irisawa, T. (VerfasserIn), Ishii, H. (VerfasserIn), Chang, W. H. (VerfasserIn)
Pages:	9
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	2020
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