Carrier Profiling of the L0-nm-order Structure in a 3D Flash Memory Cell using Scanning AC, Nonlinear Dielectric Microscopy

Carrier Profiling of the L0-nm-order Structure in a 3D Flash Memory Cell using Scanning AC, Nonlinear Dielectric Microscopy

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Veröffentlicht in:International Symposium for Testing and Failure Analysis (45. : 2019 : Portland, Or.) ISTFA 2019
1. Verfasser: Hirota, Jun (VerfasserIn)
Weitere Verfasser: Hoshino, Ken (VerfasserIn), Nakar, Tsukasa (VerfasserIn), Yamasue, Kohei (VerfasserIn), Cho, Yasuo (VerfasserIn)
Pages:2019
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Sprache:eng
Veröffentlicht: 2019
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