Crystal Separation Method of 6-Inch 4H-SiC Crystal Using Adhesion Shrinkage between a Seed and a Seed Holder in Cooling Process

Crystal Separation Method of 6-Inch 4H-SiC Crystal Using Adhesion Shrinkage between a Seed and a Seed Holder in Cooling Process

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Veröffentlicht in:International Conference on Silicon Carbide and Related Materials (18. : 2019 : Kyōto) Silicon carbide and related materials 2019
1. Verfasser: Park, J. H. (VerfasserIn)
Weitere Verfasser: Jang, B. K. (VerfasserIn), Choi, J. W. (VerfasserIn), Yang, E. (VerfasserIn), Kim, J. G. (VerfasserIn), Ko, S. K. (VerfasserIn), Kyun, M. O. (VerfasserIn), Ku, K. R. (VerfasserIn), Kim, D. S. (VerfasserIn), Lee, W . J. (VerfasserIn)
Pages:2019
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2020
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