Properties of a Tantalum Nitride Source Ta(N-t-C5H11)[N(CH3)2]3 for MOCVD

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Veröffentlicht in:Handōtai-Shūseki-Kairo-Gijutsu-Shinpojiumu (66 : 2004 : Tokio) Handōtai, Shuseki-Kairo-Gijutsu-66.-Shinpojiumu-kōen-ronbunshū
1. Verfasser: Yasuhara, S. (VerfasserIn)
Weitere Verfasser: Okuhara, Y. (VerfasserIn), Kadokura, H. (VerfasserIn)
Pages:66
Format: UnknownFormat
Sprache:jpn
Veröffentlicht: 2004
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