Effect of the Hydrophilic-Lipophilic Balance (HLB) of Surfactants Included in the Post-CMP Cleaning Chemicals on Porous SiOC Direct CMP

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Veröffentlicht in:Handōtai, Shuseki-Kairo-Gijutsu-71.-Shinpojiumu-kōen-ronbunshū
1. Verfasser: Shiohara, M. (VerfasserIn)
Weitere Verfasser: Kondo, S. (VerfasserIn), Maruyama, K. (VerfasserIn), Fukaya, K. (VerfasserIn), Yamada, K. (VerfasserIn), Ogawa, S. (VerfasserIn), Saito, S. (VerfasserIn)
Pages:71
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2007
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