Laser Micromachining of brittle and fragile functional Materials

Laser Micromachining of brittle and fragile functional Materials

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Bibliographische Detailangaben
Veröffentlicht in:International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components (8. : 2014 : Wien) Smart Systems Integration 2014
1. Verfasser: Enderlein, Tom (VerfasserIn)
Weitere Verfasser: Nestler, Jörg (VerfasserIn), Otto, Thomas (VerfasserIn), Gessner, Thomas (VerfasserIn)
Pages:2014
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2019
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