IMECE2019-11690 Thermal Property Measurements of Si µ-Cantilever Beams Using the Suspended Thermoreflectance Technique

IMECE2019-11690 Thermal Property Measurements of Si µ-Cantilever Beams Using the Suspended Thermoreflectance Technique

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Veröffentlicht in:ASME International Mechanical Engineering Congress and Exposition (2019 : Salt Lake City, Utah) Proceedings of the ASME International Mechanical Engineering Congress and Exposition - 2019 ; Volume 10: Micro- and nano-systems engineering and packaging
1. Verfasser: Sarkar, Dipta (VerfasserIn)
Weitere Verfasser: Oxandale, Samuel W. (VerfasserIn), Hieber, Tyler J. (VerfasserIn), Baboly, M. G. (VerfasserIn), Leseman, Zayd C. (VerfasserIn)
Pages:2019
Format: UnknownFormat
Sprache:eng
Veröffentlicht: 2020
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