Substrates Effect on the Phase Transition of GaN Thin Films by Sputter Deposition

Substrates Effect on the Phase Transition of GaN Thin Films by Sputter Deposition

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Veröffentlicht in:International Conference on Mechanical Structures and Smart Materials (5. : 2019 : Xi'an) Structural and smart materials III
1. Verfasser: Zhang, C. G. (VerfasserIn)
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Sprache:eng
Veröffentlicht: 2019
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