Structural analysis of sputtered Sc(x)Al(1-x)N layers for sensor applications

Structural analysis of sputtered Sc(x)Al(1-x)N layers for sensor applications

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Veröffentlicht in:International Conference on Material Science and Smart Materials (6. : 2019 : Birmingham) Materials science and smart materials
1. Verfasser: Hähnlein, Bernd (VerfasserIn)
Weitere Verfasser: Hofmann, Tim (VerfasserIn), Tonisch, Katja (VerfasserIn), Pezoldt, Jörg (VerfasserIn), Kovac, Jaroslav (VerfasserIn), Krischok, Stefan (VerfasserIn)
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Sprache:eng
Veröffentlicht: 2020
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