Effect of Amorphous Silicon Carbide Interlayer on Diamond-Like Carbon Film Structure and Film Hardness

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Veröffentlicht in:	International Conference on Machining, Materials and Mechanical Technologies (3. : 2018 : Ho-Chi-Minh-Stadt) Recent development in machining, materials and mechanical technologies III
1. Verfasser:	Kimura, Y. (VerfasserIn)
Weitere Verfasser:	Zhu, X. (VerfasserIn), Toyota, H. (VerfasserIn), Shiraishi, R. (VerfasserIn), Iwamoto, Y. (VerfasserIn), Nomura, S. (VerfasserIn)
Format:	UnknownFormat
Sprache:	eng
Veröffentlicht:	2019
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