Microlithography : science and technology

Microlithography science and technology

"Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices"--

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Bibliographische Detailangaben
Weitere Verfasser: Smith, Bruce W. (HerausgeberIn), Suzuki, Kazuaki (HerausgeberIn)
Format: UnknownFormat
Sprache:eng
Veröffentlicht: Boca Raton CRC Press 2020
Ausgabe:Third edition
Schlagworte:
Microlithography > Industrial applications > Integrated circuits > Masks > Metal oxide semiconductors, Complementary > Design and construction > Manufacturing processes
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Beschreibung
Zusammenfassung:"Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices"--
Beschreibung:Includes bibliographical references and index
Beschreibung:xi, 837 Seiten
Illustrationen, Diagramme
ISBN:9781439876756
978-1-4398-7675-6