Semiconductor fabrication: technology and metrology : [... 5. International Symposium on Semiconductor Processing ..., Santa Clara, Calif. on 1 - 5 February 1988 ...]

Semiconductor fabrication: technology and metrology [... 5. International Symposium on Semiconductor Processing ..., Santa Clara, Calif. on 1 - 5 February 1988 ...]

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Bibliographische Detailangaben
Körperschaften: ASTM Committee F-1 on Electronics (BerichterstatterIn), Semiconductor Equipment and Materials Institute (BerichterstatterIn), International Symposium on Semiconductor Processing (BerichterstatterIn)
Weitere Verfasser: Gupta, Dinesh C. (HerausgeberIn)
Format: UnknownFormat
Sprache:eng
Veröffentlicht: Philadelphia, Pa. American Society for Testing and Materials 1989
Schriftenreihe:ASTM special technical publication 990
Schlagworte:
Konferenzschrift
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Beschreibung
Beschreibung:Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute
Includes bibliographical references and indexes
ASTM publication code number (PCN) 04-990000-46"--T.p. verso
Beschreibung:476 S.
Ill., graph. Darst.
ISBN:0803112734
0-8031-1273-4