Advanced plasma science and its applications for nitride and nanomaterials [peer-reviewed papers based on presentations at the 6th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2014), held at Nagoya, Japan during March 3 - 6, 2014]
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| Format: | UnknownFormat |
| Sprache: | eng |
| Veröffentlicht: |
Tokyo
Japan Society of Applied Physics
2014
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| Schriftenreihe: | Japanese journal of applied physics
53,11S : Special issue |
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